Skip to Main content Skip to Navigation
Master Thesis

Utilisation de micropoutres sans couche sensible en vibration pour la détection d'espèces gazeuses - Réalisation d'un réseau gaz pilotable

Abstract : This report concerns study and optimization of the needed instrumentation for the characterization of silicon cantilevers, which are included in the family of the ElectroMechanical MicroSystems (MEMS), used notably for the detection of a lot of variety of analytes. In order to characterize the behaviour of cantilevers to a change of the physical properties of the surrounding media, the first part of this study concerns the realization of a new gas network pilotable under LabVIEW, which will allow to generate a gas mixture, under controlled flow, by defining a desired concentration of one or several constituents of the mixture. The second part concerns the use of this gas network and available silicon microcantilevers in the IMS Laboratory, to perform chemical detections in gaseous environment. The principle of detection is based on the dependency of both the density and the viscosity of gaseous mixtures, according to the concentration of analytes. Measurements will be performed with different gas mixtures and microcantilevers. The results will be confronted to the analytical models.
Complete list of metadata

Cited literature [45 references]  Display  Hide  Download

https://dumas.ccsd.cnrs.fr/dumas-00523378
Contributor : Cnam - Service Commun de la Documentation - Bibliothèque Centrale <>
Submitted on : Tuesday, October 5, 2010 - 9:54:17 AM
Last modification on : Saturday, February 8, 2020 - 12:00:08 PM
Long-term archiving on: : Thursday, January 6, 2011 - 2:43:26 AM

Identifiers

  • HAL Id : dumas-00523378, version 1

Collections

Citation

Vincent Cuisset. Utilisation de micropoutres sans couche sensible en vibration pour la détection d'espèces gazeuses - Réalisation d'un réseau gaz pilotable. Instrumentations et Détecteurs [physics.ins-det]. 2010. ⟨dumas-00523378⟩

Share

Metrics

Record views

286

Files downloads

3438