H. Fujita and H. Toshiyoshi, Micro actuators and their applications, Microelectronics Journal, vol.29, issue.9, pp.637-640, 1998.
DOI : 10.1016/S0026-2692(98)00027-5

R. A. Conant, P. M. Hagelin, U. Krishnamoorthy, M. Hart, O. Solgaard et al., A raster-scanning fullmotion video display using polysilicon micromachined mirrors, Sensors and Actuators A: Physical, vol.83, pp.1-3291, 2000.

A. Trouillet, Applications de la micro-optique Site internet : http://prn1.univ-lemans.fr/prn1/siteheberge/PublisCours, 2009.

M. Anduze, S. Colin, and H. Camon, Fluidic microdiodes: An alternative for microvalves

F. Akasheh, J. D. Fraser, S. Bose, and A. Bandyopadhyay, Piezoelectric micromachined ultrasonic transducers: modeling the influence of structural parameters on device performance. Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol.52, issue.3, pp.455-468, 2005.

K. Wang and C. Nguyen, High-order micromechanical electronic filters, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots, pp.25-30, 1997.
DOI : 10.1109/MEMSYS.1997.581759

K. W. Hillier, A Vibrating Cantilever Method for the Investigation of the Dynamic Elasticity of High Polymers, Proceedings of the Physical Society. Section B, vol.64, issue.11, 1951.
DOI : 10.1088/0370-1301/64/11/308

R. P. Feynman, There's Plenty of Room at the Bottom Conférence donnée le 29 Publication : Caltech's Engineering and Science Magazine, lors du congrès American Physical Society au California Institute of Technology (Caltech), 1959.

H. C. Nathanson, The resonant gate transistor, IEEE Transactions on Electron Devices, vol.14, issue.3, pp.117-133, 1967.
DOI : 10.1109/T-ED.1967.15912

K. E. Peterson, Silicon as a mechanical material, Proceedings of the IEEE, vol.70, issue.5, pp.420-457, 1982.
DOI : 10.1109/PROC.1982.12331

J. B. Angell, P. W. Barth, and S. C. Terry, Silicon Micromechanical Devices, Scientific American, vol.248, issue.4, pp.44-55, 1983.
DOI : 10.1038/scientificamerican0483-44

G. Binnig, C. F. Quate, and C. Gerber, Atomic Force Microscope, Physical Review Letters, vol.56, issue.9, pp.930-933, 1986.
DOI : 10.1103/PhysRevLett.56.930

R. S. Muller, L. S. Fan, and Y. C. Tai, Integrated Movable Micromechanical Structures for Sensors and Actuators, IEEE Transactions on Electrical Devices, vol.35, pp.724-730, 1988.

H. Camon, Contribution à la conception et à la réalisation de microsystèmes électrostatiques Rapport de synthèse pour une habilitation à diriger des recherches pp10-25, Laboratoire LAAS à Toulouse, 2005.

T. Thundat, R. Warmack, G. Chen, and D. Allison, Thermal and ambient???induced deflections of scanning force microscope cantilevers, Applied Physics Letters, vol.64, issue.21, pp.2894-2896, 1994.
DOI : 10.1063/1.111407

J. Barnes, R. Stephenson, M. Welland, C. Gerber, and J. Gimzewski, Photothermal spectroscopy with femtojoule sensitivity using a micromechanical device, Nature, vol.372, issue.6501, pp.79-81, 1994.
DOI : 10.1038/372079a0

. Site and . Du, Réseau de grandes centrales technologiques pour Recherche Technologique de Base, 2009.

P. Site, com : http://www.physorg.com/news68736004.html Section : Growing Nanostructures on Micro Cantilever Provides New Platform for Materials Discovery -Olympus AFM cantilever, 2009.

S. Paineau, P. Andreucci, and C. Schaffnit, Microsystèmes : applications et mise en oeuvre, 2005.

I. Dufour and F. Lochon, Microcapteurs chimiques en micropoutres silicium pour régime dynamique, 2006.

K. M. Goeders, J. S. Colton, and L. A. Bottomley, Microcantilevers:?? Sensing Chemical Interactions via Mechanical Motion, Chemical Reviews, vol.108, issue.2, pp.522-542, 2008.
DOI : 10.1021/cr0681041

URL : http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.463.3404

F. Lochon, Développement de microcapteurs chimiques à base de micropoutres dédiés au contrôle de la qualité de l'air, Thèse de doctorat, 2007.

C. Vancura, M. Ruegg, Y. Li, D. Lange, C. Hagleitner et al., Magnetically actuated CMOS resonant cantilever gas sensor for volatile organic compounds. Article présenté lors de la 12 ème conférence internationale « Solid-State Sensors, Actuators and Microsystems, pp.1355-1358, 2003.

C. Hagleitner, A. Hierlemann, D. Lange, A. Kummer, N. Kerness et al., Smart single-chip gas sensor microsystem, Nature, vol.414, issue.6861, pp.293-296, 2001.
DOI : 10.1038/35104535

J. Yi and W. Shih, Effect of length, width, and mode on the mass detection sensitivity of piezoelectric unimorph cantilevers, Journal of Applied Physics, vol.91, issue.3, pp.1680-1686, 2002.
DOI : 10.1063/1.1427403

C. Bergaud and L. Nicu, Viscosity measurements based on experimental investigations of composite cantilever beam eigenfrequencies in viscous media. Review of scientific instruments, pp.2487-2491, 2002.

Z. Davis, G. Abadal, O. Kuhn, O. Hansen, F. Grey et al., Fabrication and characterization of nanoresonating devices for mass detection, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol.18, issue.2, pp.612-616, 2000.
DOI : 10.1116/1.591247

P. Datskos and I. Sauers, Detection of 2-mercaptoethanol using gold-coated micromachined cantilevers, Sensors and Actuators B: Chemical, vol.61, issue.1-3, pp.75-82, 1999.
DOI : 10.1016/S0925-4005(99)00251-8

G. Abadal, Z. Davis, B. Helbo, X. Borisse, R. Ruiz et al., Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection, Nanotechnology, vol.12, issue.2, pp.100-104, 2001.
DOI : 10.1088/0957-4484/12/2/305

A. Boisen, J. Thaysen, H. Jensenius, and O. Hansen, Environmental sensors based on micromachined cantilevers with integrated read-out, Ultramicroscopy, vol.82, issue.1-4, pp.11-16, 2000.
DOI : 10.1016/S0304-3991(99)00148-5

J. Adams, G. Parrott, C. Bauer, T. Sant, L. Manning et al., Nanowatt chemical vapour detection with a self-sensing piezoelectric microcantilever array, Applied Physics Letters, issue.16, pp.83-3428, 2003.

M. P. Vivarat-perrin, Guide d'achat : les mesures de debit, pp.755-62, 2003.

B. Cretinon, Hygromètres : guide de choix ? étalonnage -utilisation. Techniques de l'ingénieur, Référence R3048, 2004.

S. Site, http://www.swagelok.com. Section : Détendeurs de pression. Consulté en novembre, 2009.

S. Site, http://www.swagelok.com. Section : Vannes de régulation. Consulté en novembre, 2009.

V. Site and . Electricité, Rubrique : Pneumatique hydraulique. Section : Electrovanne. Page : Animation d'une électrovanne assistée, 2009.

J. E. Sader, Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope, Journal of Applied Physics, vol.84, issue.1, pp.64-76, 1998.
DOI : 10.1063/1.368002

A. Maali, C. Hurth, R. Boisgard, C. Jai, T. Cohen-bouhacina et al., Hydrodynamics of oscillating atomic force microscopy cantilevers in viscous fluids, Journal of Applied Physics, vol.97, issue.7, 2005.
DOI : 10.1063/1.1873060

S. Chapman and T. G. Cowling, The Mathematical Theory of Non-Uniform Gases, American Journal of Physics, vol.30, issue.5, 1960.
DOI : 10.1119/1.1942035

R. B. Bird, W. E. Stewart, and E. N. Lightfoot, Transport Phenomena, 1960.

J. Gosse, Propriétés de transport des gaz à pression modérée. Techniques de l'ingénieur, Référence K425, 1991.

J. L. Le-goër and J. Avril, Capteurs à jauges extensométriques

C. S. Smith, Piezoresistance Effect in Germanium and Silicon, Physical Review, vol.94, issue.1, pp.42-49, 1954.
DOI : 10.1103/PhysRev.94.42

Y. A. Cengel, M. A. Boles, and M. Lacroix, Thermodynamique : une approche pragmatique, Editions Broché, pp.118-120, 2009.

D. Sonntag, Vapor pressure formulations based on the ITS-90 ans psychrometer ? Important new values of the physical constants of 1986, Meteorologische Zeitschrift, issue.70, pp.340-344, 1990.